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EIGEMBox – SECS/GEM for Old/Legacy Equipment
EIGEMBox is a unique product that adds SECS/GEM capability to your existing equipment without any hardware or software installation!
Canon FPA 5000 ES3 SECS/GEM Integration with EIGEMBox
Einnosys successfully enabled SECS/GEM functionality on the Canon FPA 5000 ES3 200 mm lithography tool using EIGEMBox, achieving automation, host connectivity, and data collection.
EIGEMBox-2000| SECS GEM for legacy equipment | Automation for legacy equipment
EIGEMBox-2000 is a unique hardware product equipped with required software that enables SECS/GEM capability on equipment that currently doesn't have one.